a novel automatic virtual metrology system architecture for tft-lcd industry based on main memory database：一种新的虚拟自动计量系统架构为基于内存数据库的tft-lcd产业.pdfVIP

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a novel automatic virtual metrology system architecture for tft-lcd industry based on main memory database：一种新的虚拟自动计量系统架构为基于内存数据库的tft-lcd产业.pdf

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a novel automatic virtual metrology system architecture for tft-lcd industry based on main memory database：一种新的虚拟自动计量系统架构为基于内存数据库的tft-lcd产业

Robotics and Computer-Integrated Manufacturing 28 (2012) 559–568 Contents lists available at SciVerse ScienceDirect Robotics and Computer-Integrated Manufacturing journal homepage: /locate/rcim A novel automatic virtual metrology system architecture for TFT-LCD industry based on main memory database Min-Hsiung Hung a,n, Wen-Huang Tsai b, Haw-Ching Yang c, Yi-Jhong Kao b, Fan-Tien Cheng b a Department of Computer Science and Information Engineering, Chinese Culture University, Taipei, Taiwan, ROC b Institute of Manufacturing Information and Systems, National Cheng Kung University, Tainan, Taiwan, ROC c Institute of System Information and Control, National Kaohsiung First University of Science and Technology, Kaohsiung, Taiwan, ROC a r t i c l e i n f o a b s t r a c t Article history: The semiconductor and thin-ﬁlm-transistor–liquid-crystal-display (TFT-LCD) industries widely value Received 5 March 2011 Automatic Virtual Metrology System (AVMS). AVMS needs to handle a large volume of VM-related data, Received in revised form which may cause poor internal database performance. In general, AVMS adopts efﬁcient but expensive 5 January 2012 commercial database management systems (DBMSs) to yield good AVMS performance. This usually Accepted 23 January 2012 makes the AVMS construction cost very high. Therefore, the industries require a novel AVMS Available online 9 February 2012 architecture with lower cost and greater efﬁciency in database. This paper proposes a novel AVMS Keywords: