a novel dual-screen projection system using a balance-type micromirror with a piezoelectric actuator：采用平衡型微镜具有压电致动器的一种新型的双屏幕投影系统.pdfVIP

Sensors and Actuators A 199 (2013) 80–88 Contents lists available at SciVerse ScienceDirect Sensors and Actuators A: Physical j o u r n a l h o m ep a g e: w w w. elsev /locate/sna Review A novel dual-screen projection system using a balance-type micromirror with a piezoelectric actuator S.C. Shen a,∗ , Y.J. Wang b , M.T. Shih a a Department of Systems and Naval Mechatronic Engineering, Research Centerfor Energy Technology and Strategy, National Cheng Kung University, Tainan, Taiwan b Department of Mechanical Engineering, National Taipei University of Technology, Taipei, Taiwan a r t i c l e i n f o a b s t r a c t Article history: This study presents an innovative dual-screen projection system (DSPS) based on a balance-type dual Received 14 January 2013 micromirror structure. This design solves the problem of existing micro-projectors only being able to Received in revised form 27 April 2013 display a single small picture. The proposed balance-type dual micromirror structure was fabricated Accepted 12 May 2013 using a signal-mask LIGA-like technology with piezoelectric actuation to form a DSPS. The DSPS consists Available online 21 May 2013 of dual micromirrors as a fast axis, an eccentric structure as a slow axis, and slender piezoelectric actuators. A Y-shaped beam connects two micromirrors to achieve a balan