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a novel piezo-driven linear-rotary inchworm actuator：一种新型的压电驱动的线性旋转尺蠖驱动器
Sensors and Actuators A 224 (2015) 78–86
Contents lists available at ScienceDirect
Sensors and Actuators A: Physical
j o u r na l h o me p a ge : w w w. elsev /locate/sna
A novel piezo-driven linear-rotary inchworm actuator
Xiantao Sun a , Weihai Chen a , Jianbin Zhang b,∗ , Rui Zhou a , Wenjie Chen c
a School of Automation Science and Electrical Engineering, Beihang University, Beijing 100191, China
b School of Mechanical Engineering and Automation, Beihang University, Beijing 100191, China
c Mechatronics Group, Singapore Institute of Manufacturing Technology, Singapore 638075, Singapore
a r t i c l e i n f o a b s t r a c t
Article history: This paper presents a novel piezo-driven linear-rotary inchworm actuator with a large motion range and
Received 19 August 2014 high resolution. Such an actuator will be indispensable in precision positioning. The proposed actuator
Received in revised form 4 January 2015 consists of four flexure modules driven by four piezoelectric actuators, namely, two clamping modules to
Accepted 22 January 2015
alternately hold the actuator shaft, one linear driving module and one rotary driving module to provide the
Available online 31 January 2015
driving force and torque, respectively. Its mechanical performance is analyzed in detail and the working
principle is also described. A prototype of the linear-rotary actuator is fabricated, with which a series of
Keywords:
experiments are carried out. The experimental results sh
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