a piezoelectric unimorph actuator based tip-tilt-piston micromirror with high fill factor and small tilt and lateral shift：单层压电执行器根据倾斜活塞镜高填充因子和较小的倾斜和侧移.pdfVIP

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a piezoelectric unimorph actuator based tip-tilt-piston micromirror with high fill factor and small tilt and lateral shift：单层压电执行器根据倾斜活塞镜高填充因子和较小的倾斜和侧移.pdf

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a piezoelectric unimorph actuator based tip-tilt-piston micromirror with high fill factor and small tilt and lateral shift：单层压电执行器根据倾斜活塞镜高填充因子和较小的倾斜和侧移

Sensors and Actuators A 167 (2011) 495–501 Contents lists available at ScienceDirect Sensors and Actuators A: Physical j o u rn al h omepage: w w w. elsev /locate/sna A piezoelectric unimorph actuator based tip-tilt-piston micromirror with high ﬁll factor and small tilt and lateral shift Yiping Zhu ∗ , Wenjing Liu, Kemiao Jia, Wenjun Liao, Huikai Xie Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL 32611, United States a r t i c l e i n f o a b s t r a c t Article history: This paper presents the design, fabrication and characterization of a piezoelectrically actuated high-ﬁll- Received 21 October 2010 factor tip-tilt-piston (TTP) micromirror with small tilt and lateral shift during scanning. The piezoelectric Received in revised form 24 February 2011 material is a sol–gel lead zirconate titanate (PZT) thin ﬁlm with a Zr/Ti ratio of 53/47. The small initial Accepted 7 March 2011 tilt and lateral-shift-free (LSF) of the mirror plate is achieved by a folded, three-segment piezoelectric Available online 12 March 2011 unimorph actuator design. The piezoelectric unimorph actuation beams consist of Pt/Ti/PZT/Pt/Ti/SiO2 multilayers, which are released via undercutting the substrate silicon. The fabricated piezoelectric Keywords: micromirror can be actuated about two rotational axes in the mirror plane and for translational ver- Micromirror Piezoelectr