飞秒激光超微细加工技术简介.docVIP

飞秒激光超微细加工技术简介 摘要：本文首先简单地介绍了飞秒激光和超微细加工技术飞秒激光加工技术的技术背景，然后较为详细地介绍了飞秒激光超微细加工技术及其特点与应用，结合飞秒激光超微细加工技术的特点将其与其它的微机械加工技术进行了比较，最后分析飞秒激光超微细加工技术的发展趋势和应用前景。 关键词：飞秒激光 超微细加工技术 飞秒激光超微细加工 Femtosecond laser micro machining technology Introduction Abstract: This paper first briefly describes the technical background of the femtosecond laser and micro machining technology and femtosecond laser micro machining technology, then a more detailed description the femtosecond laser micro machining technology and its features and applications, combined with the femtosecond laser micro machining technology will be chara