temperature sensitve micro-electro-mechanical.pptVIP

Temperature Sensitive Micro-electro-mechanical Systems (Part II) Amy Kumpel Richard Lathrop John Slanina Haruna Tada featuring MACIS 16 July 1999 Tufts University TAMPL REU Overview Brief review and progress report Basic theory and setup Imaging system, beam curvature System Analysis Incident light angle High temperature exposure E(T) and a(T) values Conclusion and Future work Brief Review of T-MEMS Measurement and characterization mechanical properties of micro-scale devices thermal properties of device materials under high temperatures Tri-layered Poly-Si and SiO2 cantilever beams Rece