静电悬浮式电容差分加速度计测量原理与动特性设计.pdfVIP

静电悬浮式电容差分加速度计测量原理与动特性设计 静电悬浮式电容差分加速度计测量原理与 动特性设计 张亮 , 陆秋海 (清华大学航天航空学院,北京 100084) 摘 要： 目前，加速度计在惯性导航、大地勘探等领域都已得到了广泛的应用。在深空探测的大背景下， 用于测量重力梯度的加速度计必须具有更小量程和更高的分辨率。静电悬浮式电容差分加速度计是可选方 案之一。此类加速度计的工作原理与经典的弹簧振子系统相似。研究与检测质量块、伺服控制的静电反馈 力和空气阻尼相关的各个参数对系统指标的影响将有助于此类加速度计的设计。本文首先介绍电容差分式 加速度计的结构设计和工作原理，并从理论上比较此类加速度计与经典弹簧振子系统的异同。在此基础上 以弹簧振子系统为原型，建立此类加速度计的动力学模型，并以这个动力学模型为对象分析此类加速度计 系统的动力学特征，包括其动力学方程、固有频率、阻尼频率、脉冲响应和阶跃响应等。同时分析加速度 计机构参数和伺服控制电路参数对系统动力学特征的影响。由于此类加速度计是用于测量空间重力梯度这 类慢变信号的，因此本文还重点分析在低频信号输入时的系统响应特征。 关键词：静电悬浮；电容差分式加速度计；伺服控制；动特性 The measuring principle and dynamic characteristics design of an electronically suspended accelerometer with differential-capacitance Zhang Liang, LU Qiu-hai (School of Aerospace, Tsinghua University, Beijing 100084, China) Abstract ：Recently, accelerometers are extensively used in the field of inertia navigation and earth exploration. In order to be used in the field of deep-space exploration, such as detecting the gravity field, new types of accelerometers with smaller range and higher resolution is required. Electro-statically suspended accelerometer with differential-capacitance is one of this type. This kind of accelerometers functions like the classical mass-spring system. In order to effectively design this accelerometer, it is necessary to study how the system characteristics are influenced by the parameters of the proof mass, servo-controlled feedback electrostatic force and the air damping. This paper firstly introduces the configuration and function of this accelerometer. The accelerometer and the mass-spring system are compared theoretically. Taking the mass-spring