纳米AlN的红外光谱分析.docVIP

摘 要 在半导体材料中，氮化铝（AlN）ABSTRACT In the semiconductor material, aluminum nitride (AlN) is excellent general properties of the material. Namely high thermal conductivity, high resistivity and fairly low coefficient of thermal expansion, hardness modest, bending strength more than alumina and oxidation boron, its insulcast is very good also, corrosion resistance is very good also. Aluminum nitride (AlN) since it has wide band gap in ultraviolet light, electronic devices , new electronic devices and field optical technology has a unique application prospect . At present, nitriding aluminum body to s