MFC 质量流量控制原理 mass flow concontrol.docVIP

/flowmeter_artchtml MFC PRINCIPLES Mass Flow Controllers (MFCs) are used wherever accurate measurement and control of a mass flow of gas is required independent of flow pressure change and temperature change in a given range. Mass Flow Meters (MFMs) are used wherever accurate measurement of gas is required without control of the flow, which is done by another device. To help understand how an MFC works, it can be separated into 4 main components: a bypass, a sensor, an electronics board and a regulating valve: The bypass, the sensor, and one part of the electronics board are the meas