Sensing Tilt With MEMS Accelerators1.docVIP

cal systems accelerators and with an accuracy of 0.3°over the full measurement range of pitch and roll is presented. Such sensor performance has been achieved, owing to the application of an original method of determining tilt angles, which is described in this paper. Experimental studies performed on a physical model of the sensor are discussed, and ways on improving the performance of the sensor are briefly introduced. Index Terms-Accelerometer, accuracy, measurements, micro-electromechanical systems (MEMS), tilt sensor. 用微机电加速度计敏感载体的倾斜角 摘要：提出了一种由标准微机电系统加速度计构成的微小角度传感器，它在满量程测量纵摇角和横摇角时的精度为0.3