MEMS receiver,filter,cmos mems.pptVIP

Both the central frequency and bandwidth are tunable by controlling the MEMS switches in the filter. By University Kebangsaan Malaysia,2008 4-Bit 10-14GHz RF MEMS Tunable Filter Micromachined Silicon Rectangular Waveguide at 400 GHz The silicon waveguide has an average loss of 0.086 dB/mm for a range of 350–460 GHz. The waveguides are formed using microfabrication techniques and demonstrate a successful first step towards the use of silicon waveguides as a viable option for THz systems. (Georgia Tech,2006) 2007年英国杜伦大学的 Gallant A J 等人采用 UV-LIGA 工艺制造了一种用于 THz 滤波器的二维金属微机构（左图），此特殊结构可以获得一种“平顶”滤波，中心频率1.4 THz，带宽 0.3 THz。 2005年英国萨里大学报道了一种 180 GHz 衬底集成波导带通纹波滤波器（右图），该器件采用光刻厚膜工艺制造，相对带宽 6.2%，对 0.01,0.1dB 的纹波滤波器插入损耗分别为 3.2,5.3dB。在 THz 频段，相比传统平面波导，衬底集成波导作为传输线可以获得较低的传输损耗。 (截面尺寸 460μm ×60 μm) 2004年德国厄兰恩—纽伦堡大学的 Biber S 的采用深槽刻蚀技术制造了一只 600 GHz 的支线耦合器（左图） MEMS-Enabled Dual-band 1.8 5-6GHz Receiver RF Front-end A 2.4-GHz MEMS-based PLL-free Multi-channel Receiver with Channel Filtering at RF (by EPFL,Switzerland,2012) A Programmable Complex FIR Filter with Integrated MEMS Filter for Front-end Charge Sampling Receiver (By STMicroelectronics,2006) The micromachining modules can either precede (pre-CMOS), follow (post-CMOS) or be performed in between (intra-CMOS) the regular CMOS process steps ST Microelectronics and CEA-LETI developed a thermally actuated metal–metal contact switch (with electrostatic clamping) to lower the actuation voltage for CMOS compatibility Rockwell Scientific has published a MEMS switch network with GaAs amplifiers. The pair of MEMS switches connect the input to the two GaAs HEMTs, which provide single transistor amplification. On-chip input and output matching networks are included. There are several successful examples of VCO by using post-foundry CMOS micro-machined high Q inductor or tunable capacitor. MEMS-enabled Reconfigurable VCO and RF Filter Oscillator Phase Noise @2.2GHz 北大国家重点实验室，2009，only simulation * * 前MEMS工艺，内MEMS工艺，后MEMS工艺 * * * 北大国家重点实验室，20