CFX共轭传热实例.docVIP

4.5.?Example Simulation of a Piezoelectric Actuated Micro-Pump （ansys的帮助里面的例子） Problem Description The working principle of micro-pumps is the actuation of a flexible membrane to obtain the driving pressure for the fluid flow. Electro-thermal, electrostatic, or piezoelectric actuators are most commonly used for this purpose. The benchmark problem is taken from A. Klein and demonstrated in Figure?4.6:?Piezoelectric Micropump Description. This device consists of a fluid chamber with a deformable membrane at the top. The membrane is actuated by a piezoelectric layer during pump operation. To es