薄膜物理与技术习课.pdf.docVIP

真空相关 ?真空是指低于一个大气压的气体空间。常用“真空度”度量。真空 度越高，压强越小。 “vacuum” = lower molecular density than in our atmosphere results in a lower pressure of gas.The vacuum degree is higher, the higher the vacuum degree, the smaller the pressure. ?常用计量单位：Pa, Torr, mmHg, bar, atm.。关系如下： ?1mmHg=133.322Pa, ?1 Torr=atm/760=133.322Pa≈1mmHg ?1 bar=105Pa  最可几度 平均速度 均方根速度  vm ( 2kT ( 2RT ( 1.41 RT M m M va ( 8kT ( 8RT ( 1.59 RT (m (M M vr ( 3