PVD涂层-(中文)解析.pptVIP

* PVD COATING PROCESS 东庵(天津)金屬有限公司 Arc PVD Coating 概要 利用PLASMA在TARGET表面使用ARC，E-Beam，Direct heating 等蒸发金属物质后增加加速Bias电压在产品表面蒸着的真空法。 Titanium(Ti) is vaporized, ionized and accelerated in one step by the arc, e-beam, direct heat. Reactive gas is added to the metal ions and ionized. All ions are accelerated towards the workpiece by the BIAS voltage Target Cathode N2 Reactive gas Workpiece TiN Ti+ Ti++ 0 ~ -1000V BIAS Voltage BIAS Voltage Vaporization, ionization Solid Target( Ti ) Ti++ Ti++ Ti+ Ti+ 0 ~ ? Arc E-beam Direct heat Heated ion cloud = Plasma 东宇热处理工业（株） PVD Coating 特征 ● 高硬度