Chap3MS学习汇编.ppt

* 湿泵不适用于存在反应气体的腔体 * 优点：响应速度快 缺点：需要校正，对于不同的气体，常有不同的测量范围 * Vacuum Regulation The vacuum regulator maintains a steady vacuum level in the system by admitting air into the system to balance incoming air with the amount of air being removed by the vacuum pump. When more air is entering the system than being removed, the vacuum level drops and the regulator closes. If more air is being removed than is entering, the vacuum level rises and the regulator opens to admit air. A good regulator will respond quickly to vacuum level changes and minimize vacuum fluctuation in the system. The ability o