全球半导体晶体生长仿真著名商业软件FEMAG蓝宝石生长模拟学习课件.pptVIP

全球半导体晶体生长仿真 著名商业软件FEMAG Sapphire growth simulation FEMAGSoft ? 2013 Sapphire growth FEMAGSoft ? 2013 Steel pulling axis Sapphire Iridium crucible Zirconium oxide Zirconium oxide granules Quartz Simulation of sapphire crystal growth by the Czochralski method Furnace model Sapphire growth (cont’d) FEMAGSoft ? 2013 Melt meshes BLM (boundary layer mesh) Coarse mesh Sapphire growth (cont’d) FEMAGSoft ? 2013 Local temperature field Result using coarse mesh Result using BLM mesh Results for 20 cm crystal length Sapphire growth (cont’d) FEMAGSoft ? 2013 Velocity field Result using coarse mesh Result