关于薄膜晶体管的课件.pptVIP

Name：Yang Qing Supervisor ：Shi Jie-Long References Vygranenko Y, Wang K, Nathan A 2007 Appl. Phys. Lett. 91 263508 Zhang J Y, Deng T S, Shen X, Zhu K T, Zhang Q F, Wu J L 2009 Acta Phys. Sin. 58 4156(in Chinese) Contents Advantages of TFT Magnetron Sputtering AFM PECVD Experimental Methods AFM XRD Output plots Transfer plots Conclusions 显微镜的发展历史 High Performance Solution-Processed Indium Oxide Thin-Film Transistors Preliminary description 1 Experiment 2 Results and discussion 3 Conclusions 4 Good visible region transparency Fabrication of TFT at low temperature High m