激光光束特定方向准直方法与技术.docVIP

激光光束特定方向准直方法与技术 摘要:基于光束漂移量反馈通过PZT 驱动的微角度控制,实时动态检测和控制激光光束特定方向的平漂量和角漂量,以达到出射光束特定方向的高稳定性。准直系统中对光束平漂量和角漂量进行了分离检测,并各自构成了平漂量和角漂量反馈控制执行系统,减小了平漂量和角漂量反馈控制中的相互耦合,提高了准直精度及准直效率。实验表明,该方法特定方向准直精度可达5 ×10 - 8 rad。关键词:激光准直; 光束漂移; 激光基准; 激光 Laser Beam Collimation Method and Technology in Given Beam Direction Abstract: in this method, displacement and angle excursions of laser beam from given direction was measured and controlled dynamically in real time through micro-angle measuring and micro-angle controlling systems based on piezoelectric driving, in the collimation system displacement excursion and angle ex