涡旋泵-思科.docxVIP

浮动式涡旋干泵的结构设计与特点周亮，倪诗茂????????摘要：??????? 涡旋干泵以其特有的性能优势，一直是真空清洁获得设备行业备受期待的产品。传统涡旋干泵，因其密封技术及加工精度上所存在的弱点而使其在许多应用中无法发挥无油涡旋压缩技术的性能优势，因而限制其大量的应用。浮动式无油涡旋干泵，通过精细的力平衡，充分发挥无油涡旋压缩技术的性能优势，从而使其成为清洁真空获得设备领域最受期待的新产品。本文从涡旋真空泵的基本工作原理、传统涡旋干泵所存在的密封及加工精度问题进行剖析，进而引出浮动式涡旋干泵结构的特点及性能优势，最后通过实验数据对比，阐明微型浮动涡旋干泵的压倒性性能优势，并对今后的市场发展进行了展望。????????关键词：清洁真空；涡旋干泵；浮动式涡旋干泵；The design and features of Floating Scroll Dry Vacuum PumpsLiam Zhou, Sam Ni????????Abstract:?With the development of Scroll Technology, dry scroll vacuum pumps have been expected to be an ideal solution to provide clean vacuum.? Due to the difficulties of sealing technology and machining accuracy, the conventional scroll pumps couldn’t fully perform the advantages of scroll technology in many applications, therefore the scroll pumps are not widely used in practice. The Floating Dry Scroll technology, having obvious advantages over conventional scroll technology, makes a significant breakthrough by resolving the difficulty of the pressure balance of the orbiting scroll. This article discusses existing non-floating scroll vacuum technology and its difficulties caused by no sealing oil and machining accuracy and explains advantages of Floating Scroll Technology. The Floating Scroll Pumps have absolute advantages over other pumps according to the testing results, and the market has shown very positive feedbacks for Floating Dry Scroll Pumps.????????Key words:?clean vacuum; dry scroll pump; floating dry scroll pump????????概述??????? 清洁无污染的真空环境一直是科学界和企业生产中所极力追求的理想真空环境，随着科学技术的不断发展提升，真空技术在各行各业应用的日益广泛。工业社会对实现和保证真空状态下工艺过程的合理性、可靠性、安全性及其技术进步，不断地提出了新的要求。涡旋干式真空泵作为20世纪80年代所发展起来的新型真空泵，由于其其他结构的真空泵所无法比拟的性能优点，一直备受业内的期待，但由于传统涡旋干式真空泵受到其结构特点及加工精度要求高的限制，未能充分发挥涡旋压缩结构的特点，将性能最优化，从而无法实现在实际工业生产中得到大规模的应用。浮动式涡旋干泵结构解决了传统涡旋干泵结构中所存在的缺陷及限制，将涡旋干泵的性能推至更高的展次，产品更稳定、可靠，容积效率、性价比更高，更适合应用于科学仪器、便携式仪器行业，半导体、新材料行业，生物制药行业，食品行业及一切对无油无污染要求更高的真空环境获得领域。????????涡旋真空泵的工作原理图1? 涡旋压缩技术工作原理Fig.1 The principle of scroll vacuum pump??????? 涡旋真空泵的工作原理源自于Creux1905年的一项发明专利，该发明采用一对互相啮合的，其中一个固定，另一