微机械(MEMS)作业微粉末注射成型环形齿轮泵.pptVIP

Development of a micro annular gear pump by micro powder injection molding T. GIETZELT, O. JACOBI, V. PIOTTER, R. RUPRECHT, J. HAUSSELT Forschungszentrum Karlsruhe, Institut fu¨ r Materialforschung III, P.O. Box 3640,76021 Karlsruhe, Germany （ ） *List 1. Introduction 2. Design and preparation 3. Methods and procedures 4. Results and discussion 5. Conclusions 1. Introduction Most microparts are made of thermoplastics or in brittle materials like silicon by deep etching. Micro-Metal Injection Molding (Micro-MIM) Micro-Ceramic Injection Molding (Micro-CIM) Micro-Powder Injection Molding (μ-PIM) LIGA-mold insert List List 2. Design and preparation List List List 3. Methods and procedures LIGA-mold insert： List List FRT-Microglider: List List · To meet the tight tolerances required for good efficiency of the annular gear pump, two complete sets of microparts were fixed at once on a glass substrate of three inch diameter by means of a special wax for the finishing operation steps. The challenge is to fix several microparts without tilting and flat on a glass substrate. List List 4. Results and discussion Using isolated microparts a module of a micro annular gear pump could be assembled as shown in Fig. 11. However, no complete micro annular gear pump with housing was assembled yet. The surface and edge quality for lapping and polishing is a function of load respectively of lapped area, disc speed, lapping material and material to be lapped. Optimization is needed for each case. However, it turned out that lapping and polishing is the best choice and most efficient way for finishing, regardless of material, if applied appropriately. ·At the start of the project no experience for the absolute precision of LIGA regarding very tight tolerances was available. It was not clear whether diffraction effects at the mask, swelling of the resist when electroplating or other undesirable effects would lead to variations of a few microns compared to the CAD-data.