检漏技术介绍资料.pptVIP

Proprietary Confidential / 检漏仪系列产品 显示器 主菜单 连接图 Bar 模式 线图模式 技术参数 Phoeni XL 300 Phoeni XL 300 Dry Phoeni XL 300Modul Lowest detectable He leak rate ( vacuum mode ) mbarl/s 5x10 -12 3x10 -11 5x10 -12 / 8x10 -12 Lowest detectable leak rate ( sniffer mode ) mbarl/s 1x10 -7 1x10 -7 1x10 -8 Max. detectable He leak rate ( vacuum mode ) mbarl/s 0,1 0,1 0,1 Max. permissible inlet pressure mbar 15 15 15 Max. permissible inlet pressure w partial flow set mbar 1000 - - Pumping speed during pump down m 3 2,5 ( 50 Hz ) 3 ( 60 Hz ) 1,6 ( 50 Hz ) 1,8 ( 60 Hz ) 16/20 ( 50 / 60 Hz ) D16B