背电子散射衍射EBSD.pptVIP

Electron Backscatter Diffraction in the SEM Introduction Definitions Electron Backscatter Diffraction (EBSD) EBSD Bragg’s Law Bragg’s Law Automated EBSD Pattern Indexing Post-Processing of Scan Data Maps Maps Maps: Texture Gradient Maps: Boundaries Charts: Boundaries Boundaries: CSL Boundaries: GBCD Charts: Grain Size Grains in OIM Grain Shape Orientations Texture Analysis Phase Differentiation Phase ID Maps: Color + Gray Scale Texture and Microstructure in Thin Films, April 2004, Beijing Neutron Diffraction: Volume Sampling X-Ray Diffraction: Surface Area Sampling Electron Diffraction: Point Specific Sampling Orientation (g): The orientation of the crystal lattice with respect to some reference frame; usual a frame defined by the processing or sample geometry. Misorientation (Dg): The orientation of one crystal lattice with respect to another. Some times termed the orientation difference or disorientation. Electron backscatter diffraction patterns (or EBSPs) are obtained in the Scanning Electron Microscope (SEM) by focusing a stationary electron beam on a crystalline sample. The sample is tilted to approximately 70 degrees with respect to the horizontal. The diffraction pattern is imaged on a phosphor screen. The image is captured using a low-light SIT or CCD camera. The bands in the pattern represent reflecting planes in the diffracting crystal volume. Thus, the geometrical arrangement of the bands is a function of the orientation of the diffracting crystal lattice. As the beam is moved from grain to grain the electron backscatter diffraction pattern (EBSP) will change due to the change in orientation of the crystal lattice in the diffracting volume l = 2dhklsinq EBSPs from molybdenum at 10kV and 40kV. (Courtesy of J. Michael) At each point in a prescribed grid collect crystallographic information using EBSD and chemical information using EDS If the crystal structure is known, the orientation can be determined automatically from a pattern. First, the bands are