《Array工艺技术基础.pptVIP

System Components Automated cassette load station ACLS (optional) Copyright BOE Technology Group Company Confidential * B2 Project Team Change life with heart Change life with heart Array 工艺技术简介 Evaluation only. Created with Aspose.Slides for .NET 3.5 Client Profile 5.2.0.0. Copyright 2004-2011 Aspose Pty Ltd. Array工艺构成 Evaluation only. Created with Aspose.Slides for .NET 3.5 Client Profile 5.2.0.0. Copyright 2004-2011 Aspose Pty Ltd. Thin-Film --- EQP ---L/UL Chamber：在ATM和Vacuum两个状态之间传送Glass的Chamber ---Transfer Chamber：把玻璃基板在各个周边的Chamber之间进行传送的Chamber，内有一个Vacuum Robot。 ---Sputter Chamber：进行De