top-downtechniquestofabracatequantumwire.docVIP

TOP-DOWN TECHNIQUES (LITHOGRAPHY) FOR MAKING QUANTUM WIRES Limin Ji, Lingyun Miao ECE Dept., University of Rochester NY, USA 14621 Introduction This paper will mainly focus on the fabrication techniques of the quantum wire. To be specific, the techniques introduced here are all top-down methods. Before the details of the techniques, there are several basic questions that have to be discussed at the beginning. The first question is what is nanotechnology? Fig 1. A parallel-shaft speed reducer gear which is one of the largest nanomechanical devices ever modeled in atomic detail. [1] As it is defined in the encyclopedia, Nanotechnology is “a field of applied science and technology covering a broad range of topics”. The major work is the control of matter on a scale smaller than 100 nanometers, by using the devices on the same length scale. This is a huge area, which includes colloidal science, chemistry, applied physics, material science, mechanical engineering and electrical engineering. The stimulus for nanotechnology is due to the recovered interest in colloidal science and invention of nano-scale analytical tools such as the atomic force microscope (AFM) and the scanning tunneling microscope (STM). Also, the occurrence of refined processes, such as electron beam lithography and molecular beam epitaxy, realize the deliberate manipulation of nanostructures and thus make the observation of novel phenomena possible. It has already applied in modern use, like the design of computer chip layouts based on surface science. The history of nanotechnology is pretty young. The concept was first appeared in “There’s Plenty of Room at the Bottom”, a talk given by physicist Richard Feynman at an American Physical Society meeting at Caltech on December 29, 1959 [2]. “ Feynman described a process by which the ability to manipulate individual atoms and molecules might be developed, using one set of precise tools to build and operate another proportionally smaller