霍爾效应实验论文霍尔效应论文.docVIP

霍尔效应实验论文霍尔效应论文 差分霍尔效应加速度测量方法及其线性实验模拟 摘 要:对磁场中对称结构的霍尔元件的输出特性进行研究,提出一种差分霍尔效应加速度测量方法。基于线性霍尔元件和圆柱形永磁体设计加速度测量模型,两个霍尔元件与磁体构成对称互补结构,以差分方式输出信号电压。建立加速度与输出电压的线性关系,实现以非接触的方式测量加速度。模型的对称互补式设计,减小了非线性因素对测量的影响,改善了输出线性度。差分式电压输出,能够抑制共模干扰和零点漂移,并提高了信号幅度。对模型进行线性模拟实验,实验结果符合理论结论。数据分析显示,测量方法具有较高灵敏度和线性度。 　　关键词:加速度;测量方法;测量模型;差分霍尔效应;非接触式 　　Differential Hall-effect Acceleration Measurement Method and 　　Its Linear Experimental Simulation 　　LI Faming,QIU Zhaoyun,JIANG Guangdong 　　(Weifang Medical University,Weifang,261053,China) 　　Abstract:Output characteristics Hall element in the magnetic field symmetry structure are studied,a Hall-differential acceleration measurement method of impact-resistant mutant is proposed.An acceleration measurement model is designed based on the linear Hall elements and the cylindrical permanent magnet,two Hall elements and the magnets constitute a symmetric complementary structure,and output signal voltage differentially.The linear relationship between acceleration and output voltage are established to achieve a non-contact way of measuring acceleration.The model′s symmetric complementary design reduces the non-linear effects of factors on the measurement and improves output linearity.Differential voltage output of the model can suppress common mode interference and zero drift,and improve the signal amplitude.Linear simulations are put on the model,and experimental study results are in line with the theoretical conclusions.Analysis of data shows that the experimental results are with high sensitivity and linearity. 　　Keywords:acceleration;measurement method;measurement model;differential Hall-effect;non-contact 　　0 引 言 　　技术成熟的微机械式加速度传感器大致分为应变式[1]、容感式[2]、热感式[3]三种。应变式加速度传感器应用的是压电效应或压阻效应,在其内部有一个弹性体支撑的质量块,加速时质量块产生压力引起弹性体产生应变,将加速度转变成电信号输出,属接触型测量方式。容感式加速度传感器内部也存在一个质量块,加速度的变化带动活动质量块的移动引起电容或电感的变化,通过测量频率改变来计算加速度[4],属非接触型测量方式。应变式、容感式测量方法均采用有形活动质量块,而热感式加速度传感器是以无形的流体热气团代替有形的质量块,热气团因惯性移动形成热场变化,通过温度传感器获得加速度信息[5],因此加速度传感器通常由感受惯性力的活动质量块和敏感元件构成。文献[6]设计对称互补结构的两种微张力测量模型,提出了对称