ppt课件-basicsofvacuumtechnology-jyvskylnyliopisto.pptVIP

Basics of Vacuum Technology Three states of residual gas Vacuum regions Residual gas Vacuum forces Some constants and equations Number of gas molecules Energy in residual gas Energy Velocity Molecules on the surface Collision distance Vacuum criteria Vacuum pumps Conductance of the flow channel * Unit: Pa = N/m2 = J/m3 1.01325 x 105 = 760 torr atm 100 mbar 105 bar Pa or N/m2 Unit d = typical distance between walls l = average collision distance Viscous state: l d/100 Collisions, energy transfer through collisions, viscous flow, diffusion Intermediate state: d/100 l d Molecular state: d l Molecules collide with the walls, heat transfer from wall to wall with molecules, no viscosity 10-10 – Good ultra 10-7 – 10-10 Ultra 10-4 – 10-7 Good high 10-1 – 10-4 High 102 – 10-1 Intermediate 105 – 102 Rough Pa Vacuum region Good ultra Surfaces stay clean Materials critical, metal seals, baking Ultra Molecular Materials, tightness, baking (150 – 400 oC) Good high Mainly molecular High Changing to molecular Intermediate Viscous Rough Vacuum region Initially air Rough vacuum: mainly air Intermediate vacuum: gas starts to get out from surfaces (outgassing) High vacuum: Mainly gases from surfaces, typically 70 – 90 % water Gradually water decreases and CO + CO2 increase Ultra vacuum: mainly Hydrogen Depends on Pump/pre-pump: most pumps pump easier heavy gases Nobel gases difficult to pump Principally residual gas is NOT thin air Note! The composition of residual gas depends on how long time the vessel has been open how it was vented what molecules can have attached on the surface (e.g. humidity - water) possible leaks Etc. Practically “zero” pressure on the vacuum side and 1 atm on the pressure side. e.g. 10 cm x 10 cm square flange: This is important when designing vacuum vessels/chambers! 1 mol ideal gas in NTP = 22.4 l Equation of state for residual gas in terms of moles Boltzmann constant Equation of state for residual gas in terms of number of molecules Avogadro constan