BASICVACUUMPRACTICE.ppt

Leak Rates over Time LEAK RATES 10 -1 STD CC/SEC 1 CC/10 SEC 10 -3 STD CC/SEC 3 CC/HOUR 10 -5 STD CC/SEC 1 CC/DAY 10 -6 STD CC/SEC 1 CC/2 WEEKS 10 -7 STD CC/SEC 3 CC/YEAR 10 -9 STD CC/SEC 1 CC/30 YEARS Permeation may occur 1X10-8 std cc/sec Why Helium is used HELIUM Helium is very light and small Low concentration in air (0.0005%) Permits dynamic testing Permits non-destructive testing Helium is safe CONVENTIONAL LEAK DETECTOR 1 2 3 4 5 6 7 8 9 10 11 12 Test Piece Test Port High Vac. Pump Roughing Pump Fore Pump RoughingValve Test Valve Pump Valve Spectrometer Tube Cold Trap Roughing Gauge Vent Valve 7 6 12 4 5 1 3 8 11 2 9 10 Ion Separation in Magnetic Field Ion Source To Pre-Amplifier Collector Magnetic Field Deflects He Ions 90O, other ions more or less than 90O. He ions pass through slit and are collected Lighter ions: more Heavier ions: less Ion Gauge Tracer probe leak detection technique Leak detectors are calibrated with the “permeation leak” * * * * * * * * * VACUUM SYSTEM USE LN2 COLD TRAP (Page 80 manual) Turbomolecular Pump ROTOR BODY HIGH PUMPING SPEED HIGH COMPRESSION EXHAUST HIGH FREQ. MOTOR INLET FLANGE STATOR BLADES BEARING BEARING (Page 81 manual) Rotor - stator assembly (Page 82 manual) Pump Operation Molecule V Moving Wall with Speed V Principle of the Turbomolecular Pump (Page 83 manual) Roughing through the turbo 1 2 3 4 5 6 Chamber Turbo Pump Roughing Pump Vent Valve Roughing Gauge High Vac. Gauge 1 6 7 4 3 2 5 2 (Page 91 manual) Pumping by Cryocondensation Cryosorption in charcoal (Page 98 manual) Charcoal placement Gauges 5 (Page 123 manual) Gauge Operating Ranges 10-12 10-10 10-8 10-6 10-4 10-2 1 10+2 P (mbar) Rough Vacuum High Vacuum Ultra High Vacuum Bourdon Gauge Thermocouple Gauge Cold Cathode Gauge Capacitance Manometer Hot Fil. Ion Gauge Residual Gas Analyzer Pirani Gauge Spinning Rotor Gauge McLeod Gauge Bourdon Gauge How the gauge works Heat Transfer Gauges Thermocouple gauge and Pirani Gauge Thermocouple Gauge How the