ppt课件-equipment performance standards integration（设备性能标准集成）.pptVIP

Julu 12, 2006 SemiCon West 2006 Sal DiIorio SEMICON West 2006 STEPMethods to Measure/Improve Equipment Productivity SEMI Equipment Performance Standards Integration Equipment Performance Metrics Process Factory sources (automated and/or human) provide the inputs Standards define the process and equations Metrics are output consistently Same meaning for all metrics regardless of location Factory Data Sources Automated Systems Production data, state history Equipment Maintenance and state history Equipment Cell Controllers Equipment E116 or E58 state information Non-automated Systems Manual st