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奈米噴塗 SnO2 與 TiO2薄膜之特性研究 The Study of SnO2 and TiO2 Thin Films by Nano Vapor Deposition 摘要 本研究將二氧化鈦(Titanium Oxide,TiO2）與二氧化錫（TinOxide，SnO2）粉末以溶膠-凝膠法(Sol-Gel Route)制備成奈米漿料，並用奈米噴塗法噴塗於鈉玻璃（Soda-Lime Glass，SLG）基板上，探討其表面及結構。將經過超音波震盪的二氧化錫奈米漿料與二氧化鈦奈米漿料以液體流量1mL/min、氣體流10L/min 、噴塗高度225mm、基板溫度400℃分別噴塗4、6及8次，進而探討噴塗時不同厚度的特性。在未進行熱處理的情況下，量測發現基板溫度為400℃時，噴塗8次的試片，表面皆有嚴重龜裂之情形，且發生沉積不均勻的現象；噴塗6次時，雖有龜裂情形發生，但較不嚴重，沉積均勻性也較好。接著將三組試片分別以450℃、500℃及550℃進行熱處理。結果顯示，經由熱處理後的試片皆有改善其龜裂狀況，其中550℃熱處理之試片已有明顯晶相產生，其表面結構也最為緊實、較無孔洞。經XRD量測後，試片繞射峰角度均落在26.5度左右，結晶面為（110）。另外，基板溫度將影響漿料噴灑於基板上時乾燥快慢，因此以基板溫度300℃分別噴塗4、6及8次經熱處理後與上述試片做比較，得知本實驗以300℃噴塗6次，450℃熱處理之參數最佳。 關鍵詞：二氧化鈦、二氧化錫、鈉玻璃、奈米噴塗法 Abstract In this study, the Nano-Ink made by Tin Dioxide (SnO2) and Titanium Oxide (TiO2) nanoparticles was prepared by Sol-Gel Route and sprayed on the Soda-Lime Glass (SLG) substrates.Then we tried to study the surface morphology by SEM and XRD measurements.The Nano-Ink was prepared by ultrasonic vibration and sprayed on the substrates under these conditions: (1)Liquid flow rate 1 mL/min, (2)Gas flow rate 10L/min, (3)Spraying height of 225 mm, (4)The substrates in 400℃ of temperature and underwent respectively sparying 4,6 and 8 times. Then we discuss the different deposition characteristics in each thickness. Those samples didn’t go through the thermal process, the substrate temperature is 400℃, we found that the surface of samples which was sprayed with 4 and 8 times of Nano-Ink were cracking severly,and the quality of deposition was un-uniform. The samples with 6 times of Nano-Ink were mildly cracking, and the deposition uniformity was better. Then the three groups of samples underwent thermal process with 450℃, 500℃ and 550℃.The result showed that the cracking condition of the samples was improved after thermal process. Moreover, we found that the group which underwent 550℃ thermal process appeared some crystalline formation on the surface of the substrates, and the surface structure was most solid, and appeared with less pore.T