电子束表面抛光进展汇编.doc

电子束抛光研究进展 魏德强 李新凯 王晓兵 （桂林电子科技大学 桂林 541004） 摘要：随着现代制造业的发展，人们对于工件表面的精密性和质量提出更高层次的要求，而抛光工艺不但影响产品的使用性能而且也影响着产品的档次。传统的抛光工艺存在着一些难以克服的问题，已很难满足当前对高质量工件表面性能的需求，作为新型非接触式抛光工艺的一种——电子束抛光，在目前的研究领域展现出显著的优势。本文概述了几种抛光技术的优缺点，并重点介绍了一种新型材料表面处理技术——电子束抛光，阐述了电子束表面抛光的基本原理及国内外电子束抛光的发展。介绍了电子束抛光作为一种新型表面抛光方法在研究领域中的应用，并综述了近年来电子束抛光研究的发展动态，简述了国内外相关领域的主要研究成果及取得的进展，包括电子束抛光机理的研究、不同材料电子束工艺参数的确定、入射角度对抛光效果的影响、物理模型的建立以及电子束抛光产生的熔坑、裂纹研究，并对电子束抛光技术未来的发展方向和前景做出了展望。电子束抛光技术作为一种极具优势的高能束表面改性技术将占据无法替代的地位。 关键词：电子束抛光 材料表面处理 表面性能 传统抛光 综述 发展 机理 中图分类号：TN29 文献标识码:A Electron Beam Polishing Technique And Applications WEI Deqiang LI Xinkai WANG Xiaobing (Guilin University of Electrical Technology, Guilin 541004, China) Abstract：With the development of modern manufacturing, precision of workpiece surface and quality put forward higher requirements, and the use of polishing process not only influence the product performance and also affects the grade of the product.Traditional polishing process there are some insurmountable problems, has been difficult to meet current demand for high quality surface performance, as a kind of new contactless polishing technology, electron beam polishing, show a significant advantage in the field of the present study.This article summarizes the advantages and disadvantages of several kinds of polishing technology. In this paper, a new material surface treatment technology is introduced which is electron beam polishing, expounds the basic principle of electron beam polishing and the development of electron beam polishing at home and abroad. Electron beam polishing is introduced as a new type of surface polishing method application in the field of research, and electron beam polishing research developments in recent years were reviewed, ?introduced the main research results and progress, including the polishing mechanism of electron beam, electron beam process parameters determination of different materials, the influence of incident Angl