Substrate temperature and strain during sputter deposition of溅射沉积过程中的衬底温度和应变.pptVIP

A Stress Analysis of Sputter Coatingon the LSST Primary-Tertiary Mirror Substrate temperature and strain during sputter deposition of aluminum on cast borosilicate glass in a Gemini Observatory coating chamber by Jacques Sebag et al. by Blake Coughenour A Summary of Results from Scientific Concepts of LSST 6 Band: 300nm-1.1μm Wide Field: f/1.25 viewing 9.62 deg2 (50x moon area) Camera: 3200 MP Data: 30 TB of data nightly Reflective Optical Coatings Metals Ave Refl Vis / IR High Absorption Comments Aluminum 92 % / 98 % 700-950nm Sensitive deposition necessary to prevent Blueing.” Thin laye