GaN的欧姆接触.pptVIP

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2017-03-14 发布于上海
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GaN的欧姆接触.ppt

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??? ??? ( Device )Lecture 3 – Shottky/Ohmic 2006 / ?? ?? Schottky Diode Metal-GaN Schottky Barrier Ohmic Contact to GaAs ( I ) Ohmic Contact to GaAs ( II ) Ti/Al Ohmic Contact for n-GaN : Ti/Al Ratio ( I ) Ti-Al Ohmic Contact for n-GaN : Ti/Al Ratio ( II ) Ti Ohmic Contact to n-GaN - without Al Layer Ti/W/Au Contact to n-GaN - without Al Layer Ti/WSi/Ti/Au Contact to n-GaN - without Al Layer Ohmic for n-AlGaN/GaN ( I ) : Ti-Al-Ni-Au Ohmic for n-AlGaN/GaN ( II ) : Ti-Al-Ni-Au Ohmic for n-AlGaN/GaN ( III ) : Ti-Al-Ni-Au Ohmic for n-AlGaN/GaN ( IV ) : Ti-Al-Ni-Au Ohmic for n-AlGaN/GaN ( V ) : Ti-Al-Ni-Au Ti/Al contacts on BCl3 RIE-etched n-GaN Mo/Al/Mo/Au Ohmic for AlGaN/GaN ( I ) Mo/Al/Mo/Au Ohmic for AlGaN/GaN ( II ) Mo/Al/Mo/Au Ohmic for AlGaN/GaN ( III ) Ti/Al/Mo/Au Ohmic for AlGaN/GaN with RIE Treatment Smooth-Surface Ti/Al/Nb/Au Ohmic for AlGaN/GaN Smooth-Surface WSi-based Ohmic for AlGaN/GaN Ti/Al/Ti/Au/WSiN Ohmic Contact to AlGaN/GaN Low-Resistance Si/Ti/Al/Ni/Au Ohmic for AlGaN/GaN Ohmic Contact to p-GaN Ohmic mechanisms for Pt/p-GaN Two-Step Treated Ohmic Contact to p-GaN I-V characteristics and transmittance of Pt/Ru contacts Thermal stability of Pt and Pt/Ru ohmic contacts at 600 oC P-Ohmic Contact to GaN with InGaN Contact Layer Epi-Up LED Design showing the Role of Current Spreading Oxide Properties Transparent Conducting Oxides Transmittance of TCOs Conductivity of TCOs Transparent Flexible Thin-Film Transistor Amorphous InGaZnO4 Transparent Oxide Semiconductor Deposited by pulsed laser deposition at RT Bandgap = 3.1eV, ?hall = 15cm2/Vs Flexible LED based on New p-type TCO P-type TCO - CuAlO2, SrCu2O2, LaCuOS - LaCuOSe (large ?hall=8cm2/Vs) Transparent p-contact to GaN p-Contact to GaN with Oxidizing Ni/Au Films ( I ) p-Contact to GaN with Oxidizing Ni/Au Films ( II ) Degradation of GaN LED due to p-contact Metal Penetration Transparent Ni/Au/Indium-Tin-Oxide(ITO) p-Contact to GaN High Brightness LED with Ni/Au/ITO p-contact Oxidized Ru and I