一种适用于扫描探针显微镜的符合扫描模式.pdfVIP

半导体光电990314 半导体光电 SEMICONDUCTOR 黯宰但周刊 田E1731费费嚣EZ OPTOELECTRONICS 1999年第3期No.31999 一种适用于扫描探针显微镜的符合扫描模式 傅星胡小唐 摘要:扫描模式问题是长期困扰包括扫描隧道显微镜(STM) ， 原子力显微镜 (AFM)在内的扫描探针显微镜(SPM)测量精度和速度的关键问题。理论与实验均表 明((符合扫描消除了原有扫描模式带来的测量误差。这种模式还使测量速度提高 了约70%， 不仅可以使现在的观察型STM的性能得到提高， 而更重要的是对SPM从观察 型向计量型的转变在扫描模式方面提供了保障， 对原子量级信息读取速度和精度的提 高也具有重要意义。 关键词:扫描隧道显微镜原子力显微镜扫描探针显微镜扫描模式 符合 扫描 中图分类号: TH742 文献标识码:A A newly developed coincidence s canning mode appropriate to SPM FU Xing ,HU Xiao-tang (College of Precision Instruments and Optical Electronics Engineering,Tianjing University,Tianjing 300072,China) Abstract: Scanning mode has been a technical puzzle for the improvement of measurement accuracy and rate of SPM ,including STM and AFM,for a long time . It is shown on theory and experiment that a newly developed cioncidence scanning mode can avoid measuring error caused by present scanning modes, and reduce the scanning time up to 70% . 1t can be used to improve the quality of image of STM . It is very significant not only to change SPM from observing one to metrology one, but also to recognize atom s accurately and speedily. Keywords: scanning tunneling microscope,atomic force microscope ,scanning probe microscope,scanning mode, ((the coincidence scanning l 引言 fùe:IIIEII qkì bcít d/bdtg99/bdtg9903/990314.htm (第 1/5 页) 20 10-3-22 15: 14:27 半导体光电990314 ［1］ 根据检测方式的不同，STM可以分为恒高法检测和恒流法检测 。恒高法是保 持针尖在样品上方一个恒定高度的水平面上做扫描运动，检测隧道电流的变化，检测 数据集代表了样品表面的形貌和电特性。用这个数据集可以作出样品表面的形貌图 像。恒高法因为不必移动