基于光学扫描法的导轨直线度测量方法.pdfVIP

第 37 卷第2 期 光学仪器 Vol. 37 , No. 2 2015 年4 月 OPTICAL INSTRUMENTS April , 2015 文章编号: 1005-5630(2015)02-0095-05 基于光学扫描法的导轨直线度测量方法 房传明，陈长军 (苏州大学机电工程学院，江苏苏州 215006) 摘要:基于多测头光学扫描法对导轨直线度的在位测量方法，提出一种新的倾角补偿的三测头 扫描方法。介绍了测量原理，椎导了基于最小二来法的直线度形状重构方法，重构出的形状可 精确反映直线度误差的高频成分，且对测量噪声有良好抑制能力。对算法进行了仿真验证，并 由实验验证了提出方法的有效性。实验结果表明，该方法可以精确地还原出台阶状的直线度形 状，测量标准偏差在 10μm 以内。 关键词: 扫描测量;直线度;三测头法;倾角补偿 中图分类号: TH 711 文献标志码: A doi: 10. 3969/ j. issn. 1005-5630.2015. 02. 001 Straightness.measurement of guide rail based on optical scanning method FANG Chuanming , CHEN Changjun Sch∞I of Mechanical and Electric Engineering. 如ochow University. Suzhou 215006, China) Abstract : An online measurement method of straightness is studied based on multi-probe optical scanning method. A three-probe scanning method with tilt compensation is proposed. Reconstructed form can accurately express the high frequency elements of the straightness error , and owns better suppression capability of the measurement noise. The meas urement principle of the proposed m ethod is introduced firstly. The construction algorithm of the straightness errors is deduced based on the least square solution and the computer simulation is performed. The experimental system is built for verificating the validity of the proposed method. The experimental results show that the proposed method can accurately reconstruct the straightness errors of step form , and the standard deviation is less than 10 micrometer. Keywords: scanning measurement; straightness; three-probe method; tilt compensation 寻| 直线度误差是