紫外固化技术在微型直接甲醇燃料电池封装中的应用.pdfVIP

第7卷第4期 纳米技术与精密工程 V01．7 No．4 2009年7月 Nanoteclmology and Precision Engineering Jal． 2009 UV Curing Technique for Micro Direct Methanol Fuel Cell Packaging ZHU Ying—li 1·2，LIANG Jun．shen91 t2，LIU Chon91’2，MA Tian．1ian91，YANG Shao．hua3，WANG Su．1i3 (1．Key I．aboratory for Micro／Nano Technology and System of Liaoning Province，Dalian University ofTechnology，Dalian 116023。China； 2．Key Laboratory for Precision and Non-Traditional Machining Technology of Ministry of Education，Dalian University of Technology， Dalian 1 16023，China；3．Direct Alcohol Fuel Cell Laboratory，Dalian Institute of Chemical Physics， Chinese Academy of Sciences，Dalian 1 16023。China) Abstract：In order to improve the effective area ratio and decrease packaging time，a micro direct metha- nol fuel cell(p．DMFC)was packaged by ultraviolet(UV)curing technique．First，the current collectors with packaging holes were prepared based on non—silicon MEMS technology．Then the IxDMFC WaS鹊- sembled and UV curing resin Was injected into the packaging holes and the gap between the two current collectors．FinaUy，the assembly was exposed under UV light for 30 S and the packaging Was completed． Experimeutal reslIlts show that this passive IDMFC with 3 mol／L methanol has a maximum power density of 2．1 mW／cm2 and an internal ohmic resistance of 800 mfl·cm2 at room temperature．which indicates that the UV curing technique is an effective method for the I山DMFC packaging and may be feasible for packaging of other MEMS devices． Keywords：UV curing technique；micro direct methanol fuel cell；packaging 紫外固化技术在微型直接甲醇燃料电池封装中的应用 朱应利1”，梁军生1，一，刘 冲1”，马天亮1，杨少华3，王素力3 (1．大连理工大学微纳米技术及系统辽宁省重点实验室，大连116023； 2．大连理工大学精密与特种加T技术教育部重点实验室，大连1 16023； 3．中国科学院大连化学物理研究所燃料电池研究室，大连116023) 摘要：为了提高燃料电池的有效面积比并减少封装用时，采用紫外固化技术成功封装了微型直接甲醇燃料电池． 首先基于非硅MEMS工艺制作了带有封装孔的燃料电池集流板，然后组装燃料电池并在封装孔和两集流板间缝隙 中注入紫外固化胶，最后用紫外灯照射30 s完成封装．实验结果显示，电池在宣温、全被动、3 moVL甲醇的条件下。 峰值功率密度为2．1 mW／cm2，内阻为800 roll·cm2．这说明紫外固化封装技术对微型直接甲醇燃料电池来说是一 种有效的方法，并有望应用于其他MEMS器件的封装． 关键词：紫外同化技术；微型直接甲醇燃料电池；封装 中图分类号：TM91 l；