线结构光扫描测头误差分析与补偿方法.pdfVIP

第 42卷第 3 期 2008 年 3 月 西安交通大学学报 JOURNAL OF XI AN ]IAOTONG UNlVERSITY 线结构光扫描测头误差分析与补偿方法 丁建军，蒋庄德，李兵，郭俊杰，陈磊 〈西安交通大学机械制造系统工程国家重点实验室， 71侧9，西安〉 Vol. 42 No3 Mar. 2008 摘要3 针对线结构光扫揣测头多项式拟合测量模型的系统误差问题，提出了-套用于该测头系统 误差提取与补偿的方法.放方法通过在不同高度测量固定直线来提取不同景深位置的测量误差，并 从中分.出 ~l头在不同测量高度存在的系统误差，同时进行高度方向上的误差补偿.然后，利用标 定结果以及高度方向的误差补偿点阵，将由标之成像网格点阵计算得到的空间点阵与实际标之空 间同格点阵进行对比，进-步提取高度误差补偿后的测量结果存在的误差佳，从而进行二次补偿与 修正.实验.l明，该方法可以有效扩大测量来深(达到 150 mm) ，并且在采用步进电机开环驱动的 普通机械精度工作台(单枪定位精度为 15μm)上测量时，能够保证在较大景深范周内具有较好的 测量精皮(土50μm). 关键询:线结构光;多项式拟合z误差分析;误差补偿;亲深 中图分类号: TH741 文献标志码:A 立意编号: 0253-987X(2008)03-0286-05 EITOr Analysis and Compensation of Linear Structured Light Scanning Prob臼 DING Jianjun . JIANG Zhuangde. LI Bing. GUO Junjie, CHEN Lei (St.te Key Laboratory lor Manu(aClur吨 SySlems Er啄ineering， Xi an J闹闹事 UnivWl?ty， Xian 71∞49，。世na) Abstrad: For polynomial Citting measuring model of a linear structured light scanning probe. the extraction and compensation methods for systematic errors of the probe 8re presented. By meas- uring fixed lines at different height. the proposed method extracts the measuring errors in posi- tions with different depth of the Cield. And systematic errors of the probe 8t different measuring height are separated from the extracted errors, and the first error ∞mpensation in the height di- rection can be implemented. Ac∞rding to the calibrating result and error compensation lattice in the height direction, a comparison is made between the spatiallattice obtained by calibrating im- age grid lattice and the practical calibrating spatial grid lattice. The remaining errors of measuring results after ∞mpensation in the height direction are further extracted. And the 5仅:ond error ∞mpensation and ∞rrection are implemented simultaneously. The experimental results show that the measuring depth of field ωn be expanded effectively and reached 150 rnm with the presented method. A high accuracy (土50μm)ωn be ensured in a large range of depth of field on ∞rnmon mechanical accuracy platfor