同心扫描法制作凹球面等距网栅的误差分析.pdfVIP

第 14 卷第 2 期 2006 年 4 月 文章编号 1004年924X(2006)02呵。 251心5 光学精密工程 Optics and Precision Engineering Vol. 14 NO.2 Apr.2006 同心扫描法制作四球丽等距网栅的误差分析 冯晓国 1 ， 2 ，卢 俊3 ，徐峰林1 ，孙连眷1 (l.中国科学院长春光学精密机械与物理研究所，吉林长春 130033; 2. 中国科学院研究生院，北京 100049;3. 长春理工大学理学院，吉林长春 130022) 摘要:纬线与纬线相交可形成球jìjj等距网栅，而采用同心扫描的运动方式可在凹球丽上生成纬线。同心扫描要求直 碍物镜光轴、直写物镜水平转轴、工件回转轴和工件分1t轴四轴交子工件凹丽球心。采用两两相交误差几何分析的方 法，得到了同心误差与离焦责和栅距误差的变化关系:随着问心误差增加，系统商焦量和栅距误差1l!增加，且二者的变化 趋势基本一致。因为附栅线宽一般要求达到微米最级，与之匹配的栅距则往往为几百微米，所以栅距误差与栅距相比可 以忽略，系统离焦量对网栅线宽的影响刽l必须认真考虑。采用几何光学基本公式对物镜系统的进一步分析农明，为了制 作细且均匀的网栅线条，必须采用小光斑，而小光斑对应的焦深也小，从而姿求离焦最小，对问心误羔要求严格;反之，则 可放宽对同心误惹的要求。 关键诩:滤波荡;也磁屏蔽;光刻;金属网栅;球函 中图分类号 :TN761 文献标识码 :A Error analysis of fabricating isometric mesh on the concave of a spherical substrate by concentric optical scanning FENG Xiaoguo1.2 ,LU Jun 3 ,XU Feng-lin 1 ,SUN Liarγchun1 (1. Changchun Institute 01 Optics , Fine Mechanics and Physics , Chinese Academy 01 Sciences , Chωngchun 130033 ,China; 2. Graduate School 01 the Chinese Academy 01 Sciences , Beíjing 100049 , Chinα; 3. College 01 Science , Changchun Unìversìty 01 Science and Technology , Chαngchun 130022 , Chinα) Abstract: An isometric mesh on the concave of a spherical substrate was formed by latitude line inter section each other , in which latitude lines was generated by a concentric optical scanning method. An optical axis , erection turning spindle , horizontal dividing spindle and a pitching dividing spindle were positioned on the concave center of the spherical substrate in concentric scanning. 丁he concentric error between these spindles with the concave center may bring on the defocus of optical system and the er- ror of the mesh period , but because the ratio of the period error to the period is very small , the latter may be ignored. 丁he theoretical analytical result shows that the line width of mesh is restricted by the dimension of focal 叩ot and the defocus of optical system determines the smallest dimension of focal spot , so the line width of mesh is restrict