Developmentandcharacterizationofaniodinebasedionic.PDFVIP

Development and characterization of an iodine field emission ion source for FIB applications The MIT Faculty has made this article openly available. Please share how this access benefits you. Your story matters. Citation Fedkiw, Timothy P., and Paulo C. Lozano. “Development and characterization of an iodine field emission ion source for focused ion beam applications.” J. Vac. Sci. Technol. B. AVS, 2009. 2648-2653. As Published /10.1116/1.3253604 Publisher American Vacuum Socie