Ashing - hardware and process.pdfVIP

Cameo?Consulting Stripping and Cleaning: The Tenacity of Plasma Processing Prepared for xxx Karen Reinhardt PESM September 2007 Cameo?Consulting Presentation Contents A little history… (OK a lot of history) What are the current stripping challenges? How are these challenges addressed? What is the future for plasma stripping? Conclusion… Why plasma is here to stay At least for a while… Cameo?Consulting Caveman Plasma 1 μm geometries Batch barrel reactor Simple reactor design Basic O2 plasma N2 and CF4 addition Uniformity But who cares, just over-ash Charging!!! But who cared, just wet etch