线性渐变滤光片的制备方法研究.pdfVIP

第38卷 第 4期 光学仪器 Vol. 38 ，No. 4 2016年 8 月 OPTICAL INSTRUMENTS August , 2016 文章编号：1005-5630(2016)04-0308-05 线性渐变滤光片的制备方法研究 陈 鹏 12 ,罗露雯12 , 盛 斌 12 ,黄元申12 (1.上海理工大学上海市现代光学系统重点实验室，上海 200093; 2.上海理工大学光电信息与计算机工程学院，上海 200093) 摘要 ：提 出了一种离子束刻蚀制备线性渐变滤光片（LVOF)的方法。离子束刻蚀过程中，通过 在样片和离子束出射窗口之间加入开有三角形透射窗口的挡板以及样片水平方向多次来回运 动完成楔形谐振腔层制备，配合离子束辅助反应电子束真空镀膜技术，完成线性渐变滤光片的 制作。设计三组不同刻蚀次数的制作实验，制作出了工作波长为500? 580 nm 、线色散系数为 1. 03 nm . mm一1的线性渐变滤光片。实验结果表明，通过调节样品台运动速率或者刻蚀次数， 能够制备出具有预期楔角谐振腔层的线性渐变滤光片。 关键词 ：线性渐变滤光片（LV O F);间隔层；离子束刻蚀 中图分类号：0 43 文献标志码：A doi: 10. 3969/j. issa 1005-5630. 2016. 04. 006 Study on fabrication method of linear variable filter CHENPeng1^, LUO Lwwen12, SHEN Bin12, HUANG Yuanshen12 (1. Shanghai Key Laboratory of Modern Optical System, University of Shanghai for Science and Technology, Shanghai 200093, China ； 2. School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China) Abstract： Method of fabricating linear variable optical filters (LVOF) by ion beam etching with masking mechanisms has been proposed. A triangle-shaped mask is designed and set between the ion source and sample. During the ion etching, the sample is moved back and forth repeatedly with a constant velocity for purpose of obtaining the linearly varied thickness of the cavity. Combining with ion beam assistant thermal oxidative electron beam evaporation deposition technology, the fabrication of LVOF can be completed. Three different times for etching during ion beam etching process were designed and performed. Filtering range lies in 500^580 nm and line dispersion coefficient of 1. 03 nm ? mm—1 have been fabricated. The measured results indicated that by adjusting the scanning frequenc