分光镜对外差激光干涉仪非线性的影响.pdfVIP

维普资讯 学兔兔 第44卷第9期 机 械 工 程 学 报 Vo1．44 No．9 2008年 9月 CHINESE JOURNAL OF MECHANICAL ENGIN EERING Sep． 2 0 0 8 DoI：10．3901，JME．2008．09．163 分光镜对外差激光干涉仪非线性的影响木 侯文玫 张运波 许琦欣 (上海理工大学光学与电子信息工程学院 上海 200093) 摘要：外差干涉仪的非线性误差不仅由激光源的椭圆偏振态或者非正交线偏振态引起，也由非理想的光学器件引起，其中分 光镜是一个重要的误差源。除了通常熟知的偏振漏光，还分析偏振分光镜中可能存在的另一个误差，即偏振分光的正交性， 介绍这种误差和其他各种原因(包括激光源的椭圆偏振态或者非正交线偏振态)对外差干涉仪非线性误差的影响，给出检测和 区分两类不同频率混叠误差的方法。通过试验证实，偏振分光镜的漏光误差对外差干涉仪非线性的影响通常是可以被忽略不 计的。试验研究还发现，与传统的理论假设相反，非偏振分光镜比偏振分光镜对外差干涉仪的非线性误差有着更严重的影响。 关键词：外差干涉仪 非线性 非正交 分光镜 中图分类号：TGl56 Effect of Beam Splitter on Nonlinearity in Heterodyne Interferometers HOU Wenmei ZHANG Yunbo XU Qixin (College of OpticalElectronic Information Engineering．University of Shanghai for Science and Technology,Shanghai 200093) Abstract：The nonlinearity of heterodyne interferometers is caused not only by polarization ellipticity or nono~hogonality of the laser beams，but also the nonideal optical parts，in which the beam splitter is an important error source．The nono~hogonality of the polarization splitting directions of polarizing beam splitter is also studied besides the well known polarized light leakage．Their different influences on the nonlinearity of heterodyne interferometer(including other reasons suchas polarization ellipticity or nono~hogonality of the laser beams)are described．It shows how to examine and distinguish experimentally between two typical frequency mixing errors which could often be mistaken．It shows that the frequency mixing due to the leakage of the polarizing beam splitter can be generally neglected．In addition，an important fac