在塑料表面用磁吭谪溅射制备电磁屏蔽膜的研究.pdfVIP

真空科学与技术学报． 第28卷增刊 CHINKSEJoI『RNAI．oFVAcI兀肌SCI刚CEAND1EC鼎010GY 2008年5月 在塑料表面用磁控溅射制备电磁屏蔽膜的研究 陈省区 王德苗。 赵欢畅 苏达任高潮 (浙江大学信电系杭州310027) Growthof Films Grown ElectromagneticShielding onPlasticSubstrates， byMagnetronSputtering Chen Gaochao Demiao。，Zhao Da，Ren Shengqu，Wang Huanchang，Su (脚．of蜘．瓤．Elec．Eng．，ZhejiangUnit研sity，胁咖310027，Ch／na) AbsUaetA of metallic were the varietymulti—layeredcoatingsdepositedbymagnetronsputtering，forpllI】pa眈of electronics were electromagneticshielding(EM)ofdevice，onpolyethylene coatings characterizedwith electron itsEM wasevaluatedwithalab-mademicrowave microscopy(SEM)and scanning shielding resultsshowthatthefilmsworkwell．We thatthe setup．The suggest copper／stainless worksbestin thec0哪Ilercial ofEM becauseofits and coating meeting requirementsshielding good吼IIfacepropertieshi出 becauseofits in interfacial effectivenessEM callbeob— adhesi∞，500kPa，and shielding．For shielding example，60db tainedatathicknessof764iliaandata 0f2．5 isthatwhenitCOllle8toEM frequencyGHz．Interestingfinding shielding， the onbothsidesofPETsubstrateworksbetterthanthe ofthesall]屺thickness． coatings comings