ValveSolutionsπPC.PDFVIP

Type PC90 with a rotatable 4 character dot matrix LED display V a l v e πPC S INTEgRATED PRESSuRE CONTROllER FOR ClOSED lOOP PRESSuRE MEASuREMENT AND o W CONTROl OF PROCESS CRITICAl APPlICATIONS The πPC is a critical process control instrument in the MKS line of digital control, web- l W enabled products, providing the latest in pressure measurement and control technology u W necessary to meet the process demands of the semiconductor and other leading edge process industries. t .M The πPC Pressure Controller provides pressure measurement and control of process critical pressures utilizing MKS Instruments’ industry leading Baratron capacitance manometer i technology. The πPC is available with a Full Scale pressure from as low as 1000 torr up o K to 100 psia. Baratron capacitance manometers - well-known for their percent of Reading S accuracy, stability and resolution – provide precise measurements at lower pressures and over a wider dynamic range than strain gage transducers. n I N The πPC Pressure Controller is a self-contained, compact, closed-loop electronic pressure s S control system designed for a wide range of pressure and flow conditions. It contains a capacitance manometer, normally closed or normally open control valve and closed–loop T control electronics. The πPC is available in either an upstream or downstre