On-Line Metrology with Conoscopic Holography Beyond Triangulation 英文参考文献.docVIP

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On-Line Metrology with Conoscopic Holography Beyond Triangulation 英文参考文献.doc

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On-Line Metrology with Conoscopic Holography Beyond Triangulation 英文参考文献

Sensors2009,9,7021-7037;doi:10.3390/OPENACCESS sensors ISSN1424-8220 /journal/sensors Review On-LineMetrologywithConoscopicHolography:Beyond Triangulation IgnacioAlvarez′ ,JorgeMarina andGuillermoOjea 1 2 1 1 ,JoseM.Enguita 1,?,Mar′?aFrade 1 UniversityofOviedo,Dept.ElectricalEngineering.CampusdeViesquess/n,33204Gij′on,Spain; E-Mails:ialvarez@isa.uniovi.es(I.A.);mfrade@isa.uniovi.es(M.F.);gojea@isa.uniovi.es(G.O.) DSIPlus,Cirujeda12,Bajo,33205Gij′on,Spain;E-Mail:jorgemj@isa.uniovi.es 2 ? Authortowhomcorrespondenceshouldbeaddressed;E-Mail:chema@isa.uniovi.es; Tel.:+34-985-18-25-31;Fax:+34-985-18-20-68. Received:23July2009;inrevisedform:26August2009/Accepted:28August2009/ Published:4September2009 Abstract:On-linenon-contactsurfaceinspectionwithhighprecisionisstillanopenproblem. Lasertriangulationtechniquesarethemostcommonsolutionforthiskindofsystems, but thereexistfundamentallimitationstotheirapplicabilitywhenhighprecisions,longstandoffs or large apertures are needed, and when there are dif?cult operating conditions. Other methods are, in general, not applicable in hostile environments or inadequate for on-line measurement. In this paper we review the latest research in Conoscopic Holography, an interferometric technique that has been applied successfully in this kind of applications, rangingfromsubmicrometricroughnessmeasurements,tolongstandoffsensorsforsurface defectdetectioninsteelathightemperatures. Keywords:opticalmetrology;conoscopicholography;industrialinspection 1. Introduction Modernmanufacturingrequireson-lineinspectionmethodstostaycompetitive. Metrologysystems abletodetectsurfacedefects,measuredimensionsand,ingeneral,acquiredataaboutthegeometrical shape of objects in a 3-D space, are a must for quality control, industrial inspection or reverse engineering. Inadditionthesesystemsmustbeversatile,reliable,inexpensiveandeasytosetup,and often must be able to work in real time to give fast feedback in the