Quantitative Accelerated Life Testing of MEMS Accelerometers 英文参考文献.docVIP

Sensors 2007, 7, 2846-2859 sensors ISSN 1424-8220 ? 2007 by MDPI /sensors Full Research Paper Quantitative Accelerated Life Testing of MEMS Accelerometers Marius Bazu 1,*, Lucian G?l??eanu 1, Virgil Emil Ilian 1, Jerome Loicq 2, Serge Habraken 2 and Jean-Paul Collette 2 1 National Institute for RD in Microtechnologies – IMT-Bucharest, 126A, Erou Iancu Nicolae Street, 077190, Bucharest, Romania. E-mails: mbazu@imt.ro, luciang@imt.ro, ilian_ve@imt.ro 2 Centre Spatial de Liège - CSL (Université de Liège), Place du 20-Ao?t, 9 à B-4000 Liège, Belgium. E-mails: J.Loicq@ulg.ac.be, shabraken@ulg.ac.be, jpcollette@ulg.ac.be * Author to whom correspondence should be addressed. Received: 27 September 2007 / Accepted: 14 November 2007 / Published: 20 November 2007 Abstract: Quantitative Accelerated Life Testing (QALT) is a solution for assessing the reliability of Micro Electro Mechanical Systems (MEMS). A procedure for QALT is shown in this paper and an attempt to assess the reliability level for a batch of MEMS accelerometers is reported. The testing plan is application-driven and contains combined tests: thermal (high temperature) and mechanical stress. Two variants of mechanical stress are used: vibration (at a fixed frequency) and tilting. Original equipment for testing at tilting and high temperature is used. Tilting is appropriate as application-driven stress, because the tilt movement is a natural environment for devices used for automotive and aerospace applications. Also, tilting is used by MEMS accelerometers for anti-theft systems. The test results demonstrated the excellent reliability of the studied devices, the failure rate in the “worst case” being smaller than 10-7h-1. Keywords: reliability, accelerometers, MEMS, tilting, vibration. 1. Introduction The Micro Electro Mechanical Systems (MEMS), with the new variant MOEMS (Micro Optical Electro Mechanical Systems), also known as