电容式微机械陀螺双环路闭环驱动电路研究.pdfVIP

第23卷 第 10期 传 感 技 术 学 报 Vol_23 No．10 2010年 lO月 CHINESE JOURNALOFSENSORSAND ACTUATORS 0ct．20l0 TheResearchontheDualClosed-LoopDrivingCircuitsforMicro-MachinedGyroscope Ⅳ Xiaoyun ，LEILonggang，WANG Guanshi (MEMSCenter，HarbinInstituteofTechnology，Harbin150001，China) Abstract：Inordertoimprovementthedetectionsensitivityformicro—machinedgyroscope，Studyingonthedriving circuitsofthemicro．machinedgyroscopethedualclosed-loopdrivingschemeofrmicro—machinedgyroscopeispro— posed，basedontheanalysisofthephasetheoryandamplitudetheory ，andtheschemeisverifiedbyusingSimu— linkmode1．Therelatedcircuitshavealsobeenimplemented．ConsideringthecharacteristicsofPhase-LockedLoop (PLL)，PLLisappliedtoadjusttherfequencyofdrivingsignalinaccordancewiththeresonantrfequencyinthe drivingmode；theamplitudecontrolincludespeakdetector，DCcomparatorandVariableGainAmplifier(VGA)to achievetheconstantamplitude．Thesimulationresultsshow that，settingtimeofstableoscillationisat45msand thestableoscillationfrequencyis2．7553kHz．Thefrequencydifferencebetweendrivingfrequencyandresonant rfequencyisonly0．1Hz．Frequencyjitteris0．056563Hz．Comparedwiththetraditionalclosed—loopdrivingcir— cuits，settingtimeofthedualclosed—loopdrivingcircuitsshorten30．77％．Therfequencyjitteris32．72％ ofthe AGC closed—loopdrivingcircuitsformicro—machinedgyroscope，thedualclosed—loopdrivingcircuitsofrmicro—ma— chinedgyroscopeimprovedthequalityofthedrivingsigna1．Soitissignificativefortheimprovementofthedetec— tionsensitivityformicro—machinedygroscope． Keywords：dualclosed—loopdriving；micro—machinedgyroscope；PLL；VGA；simulink EEACC：7630：1250 doi：10．3969／j．issn．1004—1699．2010．10．018 电容式微机械陀螺双环路闭环驱动电路研究 谭晓昀 ，雷龙刚，王冠石 (哈尔滨工业大学 MEMS中心，哈尔滨 150001) 摘 要 ：为了提高微机械陀螺系统的检测灵敏度，对微机械陀螺系统的驱动电路进行了研究。分析了微陀螺闭环驱动系统 理论，基于此提出一种双环路闭环驱动方法，并且利用数学工具 simulin