2.2QCIF角段差改善分解.ppt

*/2 Color Filter Tech Change life with heart 2.2 QCIF Angle THK Improvement Test BOECD Color Filter Dept. 申 请 审 批 制 作 审 核1 审 核2 批 准 职位/姓名 / / / / 日 期 2.2 QCIF Angle THK Improvement Test 1、Coater Improvement Item Improvement Item 2、Exposure and Developer Improvement Item VCD Delay After Coating process finished, Glass was delayed several seconds to flat Color Resist before solvent dried which won’t affect tact time at the same time. Coating Nozzle Gap Coating Gap Changed from 120μm to 100μm 3、RGB Thickness Change Form 1.7μm to 2.2μm, Color Gamut Change to 60% CD of RGB SPEC for 2.2 QCIF is 61μm, and now the mass production is reduced to 58-59μm base on angle THK Improvement. For future improvement, CD could not be reduced any more. a. Exposure energy and gap: Base on mass production condition, exposure energy is gradually reduced and gap changed accordingly.? b. Align Offset: From the picture of angle THK test form PS, angle THK is not equal between one edge and another edge of a sub pixel. So adjust align offset to fine-tune?exposure area to reduce the higher angle THK edge to a lower angle THK c. Developer: Developed time will not act on CD of RGB at mass production condition, but it is not sure when the exposure energy is lower. RGB Thickness for 2.2 QCIF is 1.7μm, For considering of Angle THK Improvement, RGB Thickness is changed to 2.2μm only one pcs. Summary 1、Coater Improvement Item 2、Exposure and Developer Improvement Item 3、RGB Thickness Change Form 1.7μm to 2.2μm, Color Gamut Change to 60% VCD Delay Color Resist won’t flat as the extension of time before VCD process because of surface tension of Color Resist . So this item have no impact on angle THK improvement. There are no obvious improvement of angle THK for RGB. Coating Nozzle Gap Nozzle Gap have no effect on angle THK for RGB. a. Exposure energy and gap: Lower exposure energy will lead to narrow of CD, but the reliability will be affected, so the ene