A Novel Integrated Multifunction Micro-Sensor for Three-Dimensional Micro-Force Measurements.docVIP

Sensors 2012, 12, 4051-4064; doi:10.3390/s120404051 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article A Novel Integrated Multifunction Micro-Sensor for Three-Dimensional Micro-Force Measurements Weizhong Wang, Yulong Zhao * and Yafei Qin State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, No. 28, Xianning West Road, Xi’an, Shaanxi 710049, China; E-Mails: w.w.z.2007@ (W.W.); yafeiqin2011@163.com (Y.Q.) * Author to whom correspondence should be addressed; E-Mail: zhaoyulong@; Tel./Fax: +86-029-8339-5073. Received: 9 February 2012; in