An Electromagnetically Excited Silicon Nitride Beam Resonant Accelerometer.docVIP

Sensors 2009, 9, 1330-1338; doi:10.3390/OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article An Electromagnetically Excited Silicon Nitride Beam Resonant Accelerometer Deyong Chen *, Zhengwei Wu, Lei Liu, Xiaojing Shi and Junbo Wang Institute of Electronics, Chinese Academy of Sciences, State Key Laboratories of Transducer Technology, Beijing, P.R. China * Author to whom correspondence should be addressed; E-Mail: dychen@; Tel.: +86-10 Fax: +86-10Received: 26 January 2009; in revised form: 16 February 2009 / Accepted: 23 February 2009 / Published: 26