An Integrated Laser-Induced PiezoelectricDifferential Confocal Surface Acoustic Wave System for Measurement of Thin Film Young’s Modulus.docVIP

Sensors 2012, 12, 12208-12219; doi:10.3390/s120912208 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article An Integrated Laser-Induced Piezoelectric/Differential Confocal Surface Acoustic Wave System for Measurement of Thin Film Young’s Modulus Fei Yang, Dante J. Dorantes-Gonzalez *, Kun Chen, Zimo Lu, Baoyin Jin, Yanning Li *, Zhi Chen and Xiaotang Hu State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Weijin Road, No.92, Tianjin 300072, China; E-Mails: ydishikun@163.com (F.Y.); chenkun789@ (K.C.); zimo.lu@ (Z.L.); bao420487704@163.com (B.J.);